5/8/2012	9:36:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2012	9:36:21 AM	Recipe started at 9:36 AM
5/8/2012	9:36:21 AM	Helium valve closed
5/8/2012	9:36:21 AM	H2 valve closed
5/8/2012	9:36:21 AM	BCl3 valve closed
5/8/2012	9:36:21 AM	PH3 valve closed
5/8/2012	9:36:21 AM	SiCl4 pre valve closed
5/8/2012	9:36:21 AM	SiCl4 post valve closed
5/8/2012	9:36:21 AM	Main Vac valve closed
5/8/2012	9:36:21 AM	Bypass valve closed
5/8/2012	9:36:21 AM	Bubbler valve closed
5/8/2012	9:36:21 AM	Helium MFC set to  0.000000
5/8/2012	9:36:21 AM	H2 MFC set to  0.000000
5/8/2012	9:36:21 AM	BCl3 MFC set to  0.000000
5/8/2012	9:36:21 AM	PH3 MFC set to  0.000000
5/8/2012	9:36:21 AM	SiCl4 MFC set to  0.000000
5/8/2012	9:36:21 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:36:21 AM	Tube furnace set to 0
5/8/2012	9:36:24 AM	H2 valve closed
5/8/2012	9:36:24 AM	BCl3 valve closed
5/8/2012	9:36:24 AM	PH3 valve closed
5/8/2012	9:36:24 AM	SiCl4 pre valve closed
5/8/2012	9:36:24 AM	SiCl4 post valve closed
5/8/2012	9:36:24 AM	Main Vac valve closed
5/8/2012	9:36:24 AM	Bypass valve closed
5/8/2012	9:36:24 AM	Bubbler valve closed
5/8/2012	9:36:24 AM	Helium valve opened
5/8/2012	9:36:24 AM	Helium MFC set to  500.000000
5/8/2012	9:36:24 AM	H2 MFC set to  0.000000
5/8/2012	9:36:24 AM	BCl3 MFC set to  0.000000
5/8/2012	9:36:24 AM	PH3 MFC set to  0.000000
5/8/2012	9:36:24 AM	SiCl4 MFC set to  0.000000
5/8/2012	9:36:24 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:36:24 AM	Tube furnace set to 0
5/8/2012	9:37:37 AM	Helium valve closed
5/8/2012	9:37:37 AM	H2 valve closed
5/8/2012	9:37:37 AM	BCl3 valve closed
5/8/2012	9:37:37 AM	PH3 valve closed
5/8/2012	9:37:37 AM	SiCl4 pre valve closed
5/8/2012	9:37:37 AM	SiCl4 post valve closed
5/8/2012	9:37:37 AM	Main Vac valve closed
5/8/2012	9:37:37 AM	Bypass valve closed
5/8/2012	9:37:37 AM	Bubbler valve closed
5/8/2012	9:37:37 AM	Helium MFC set to  0.000000
5/8/2012	9:37:37 AM	H2 MFC set to  0.000000
5/8/2012	9:37:37 AM	BCl3 MFC set to  0.000000
5/8/2012	9:37:37 AM	PH3 MFC set to  0.000000
5/8/2012	9:37:37 AM	SiCl4 MFC set to  0.000000
5/8/2012	9:37:37 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:37:37 AM	Tube furnace set to 0
5/8/2012	9:37:38 AM	Run finished at 9:37 AM
5/8/2012	9:37:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2012	9:53:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2012	9:53:16 AM	Recipe started at 9:53 AM
5/8/2012	9:53:16 AM	Helium valve closed
5/8/2012	9:53:16 AM	H2 valve closed
5/8/2012	9:53:16 AM	BCl3 valve closed
5/8/2012	9:53:16 AM	PH3 valve closed
5/8/2012	9:53:16 AM	SiCl4 pre valve closed
5/8/2012	9:53:16 AM	SiCl4 post valve closed
5/8/2012	9:53:16 AM	Main Vac valve closed
5/8/2012	9:53:16 AM	Bubbler valve closed
5/8/2012	9:53:16 AM	Bypass valve opened
5/8/2012	9:53:16 AM	Helium MFC set to  0.000000
5/8/2012	9:53:16 AM	H2 MFC set to  0.000000
5/8/2012	9:53:16 AM	BCl3 MFC set to  0.000000
5/8/2012	9:53:16 AM	PH3 MFC set to  0.000000
5/8/2012	9:53:16 AM	SiCl4 MFC set to  0.000000
5/8/2012	9:53:16 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:53:16 AM	Tube furnace set to 0
5/8/2012	9:54:27 AM	Helium valve closed
5/8/2012	9:54:27 AM	H2 valve closed
5/8/2012	9:54:27 AM	BCl3 valve closed
5/8/2012	9:54:27 AM	PH3 valve closed
5/8/2012	9:54:27 AM	SiCl4 pre valve closed
5/8/2012	9:54:27 AM	SiCl4 post valve closed
5/8/2012	9:54:27 AM	Main Vac valve closed
5/8/2012	9:54:27 AM	Bubbler valve closed
5/8/2012	9:54:27 AM	Bypass valve opened
5/8/2012	9:54:27 AM	Helium MFC set to  0.000000
5/8/2012	9:54:27 AM	H2 MFC set to  0.000000
5/8/2012	9:54:27 AM	BCl3 MFC set to  0.000000
5/8/2012	9:54:27 AM	PH3 MFC set to  0.000000
5/8/2012	9:54:27 AM	SiCl4 MFC set to  0.000000
5/8/2012	9:54:27 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:54:28 AM	Tube furnace set to 0
5/8/2012	9:55:28 AM	Helium valve closed
5/8/2012	9:55:28 AM	H2 valve closed
5/8/2012	9:55:28 AM	BCl3 valve closed
5/8/2012	9:55:28 AM	PH3 valve closed
5/8/2012	9:55:28 AM	SiCl4 pre valve closed
5/8/2012	9:55:28 AM	SiCl4 post valve closed
5/8/2012	9:55:28 AM	Bypass valve closed
5/8/2012	9:55:28 AM	Bubbler valve closed
5/8/2012	9:55:28 AM	Main Vac valve opened
5/8/2012	9:55:28 AM	Helium MFC set to  0.000000
5/8/2012	9:55:28 AM	H2 MFC set to  0.000000
5/8/2012	9:55:28 AM	BCl3 MFC set to  0.000000
5/8/2012	9:55:28 AM	PH3 MFC set to  0.000000
5/8/2012	9:55:28 AM	SiCl4 MFC set to  0.000000
5/8/2012	9:55:28 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:55:28 AM	Tube furnace set to 0
5/8/2012	9:55:29 AM	Run finished at 9:55 AM
5/8/2012	9:55:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2012	11:55:17 AM	Main Vac valve closed
5/8/2012	11:55:38 AM	Main Vac valve opened
5/8/2012	11:57:52 AM	Recipe started at 11:57 AM
5/8/2012	11:57:52 AM	Helium valve closed
5/8/2012	11:57:52 AM	H2 valve closed
5/8/2012	11:57:52 AM	BCl3 valve closed
5/8/2012	11:57:52 AM	PH3 valve closed
5/8/2012	11:57:52 AM	SiCl4 pre valve closed
5/8/2012	11:57:52 AM	SiCl4 post valve closed
5/8/2012	11:57:52 AM	Bypass valve closed
5/8/2012	11:57:52 AM	Bubbler valve closed
5/8/2012	11:57:52 AM	Main Vac valve opened
5/8/2012	11:57:52 AM	Helium MFC set to  0.000000
5/8/2012	11:57:52 AM	H2 MFC set to  0.000000
5/8/2012	11:57:52 AM	BCl3 MFC set to  0.000000
5/8/2012	11:57:52 AM	PH3 MFC set to  0.000000
5/8/2012	11:57:52 AM	SiCl4 MFC set to  0.000000
5/8/2012	11:57:52 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	11:57:53 AM	Tube furnace set to 0
5/8/2012	11:57:56 AM	Helium valve closed
5/8/2012	11:57:56 AM	H2 valve closed
5/8/2012	11:57:56 AM	BCl3 valve closed
5/8/2012	11:57:56 AM	PH3 valve closed
5/8/2012	11:57:56 AM	SiCl4 pre valve closed
5/8/2012	11:57:56 AM	SiCl4 post valve closed
5/8/2012	11:57:56 AM	Main Vac valve closed
5/8/2012	11:57:56 AM	Bypass valve closed
5/8/2012	11:57:56 AM	Bubbler valve closed
5/8/2012	11:57:56 AM	Helium MFC set to  0.000000
5/8/2012	11:57:56 AM	H2 MFC set to  0.000000
5/8/2012	11:57:56 AM	BCl3 MFC set to  0.000000
5/8/2012	11:57:56 AM	PH3 MFC set to  0.000000
5/8/2012	11:57:56 AM	SiCl4 MFC set to  0.000000
5/8/2012	11:57:56 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	11:57:56 AM	Tube furnace set to 0
5/8/2012	11:57:59 AM	Helium valve closed
5/8/2012	11:57:59 AM	BCl3 valve closed
5/8/2012	11:57:59 AM	PH3 valve closed
5/8/2012	11:57:59 AM	SiCl4 pre valve closed
5/8/2012	11:57:59 AM	SiCl4 post valve closed
5/8/2012	11:57:59 AM	Main Vac valve closed
5/8/2012	11:57:59 AM	Bypass valve closed
5/8/2012	11:57:59 AM	Bubbler valve closed
5/8/2012	11:57:59 AM	H2 valve opened
5/8/2012	11:57:59 AM	Helium MFC set to  0.000000
5/8/2012	11:57:59 AM	H2 MFC set to  500.000000
5/8/2012	11:57:59 AM	BCl3 MFC set to  0.000000
5/8/2012	11:57:59 AM	PH3 MFC set to  0.000000
5/8/2012	11:57:59 AM	SiCl4 MFC set to  0.000000
5/8/2012	11:57:59 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	11:57:59 AM	Tube furnace set to 0
5/8/2012	11:59:16 AM	Helium valve closed
5/8/2012	11:59:16 AM	BCl3 valve closed
5/8/2012	11:59:16 AM	PH3 valve closed
5/8/2012	11:59:16 AM	SiCl4 pre valve closed
5/8/2012	11:59:16 AM	SiCl4 post valve closed
5/8/2012	11:59:16 AM	Main Vac valve closed
5/8/2012	11:59:16 AM	Bypass valve closed
5/8/2012	11:59:16 AM	H2 valve opened
5/8/2012	11:59:16 AM	Bubbler valve opened
5/8/2012	11:59:16 AM	Helium MFC set to  0.000000
5/8/2012	11:59:16 AM	H2 MFC set to  500.000000
5/8/2012	11:59:16 AM	BCl3 MFC set to  0.000000
5/8/2012	11:59:16 AM	PH3 MFC set to  0.000000
5/8/2012	11:59:16 AM	SiCl4 MFC set to  0.000000
5/8/2012	11:59:16 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	11:59:16 AM	Tube furnace set to 0
5/8/2012	11:59:17 AM	Helium valve closed
5/8/2012	11:59:17 AM	BCl3 valve closed
5/8/2012	11:59:17 AM	PH3 valve closed
5/8/2012	11:59:17 AM	SiCl4 pre valve closed
5/8/2012	11:59:17 AM	SiCl4 post valve closed
5/8/2012	11:59:17 AM	Main Vac valve closed
5/8/2012	11:59:17 AM	Bypass valve closed
5/8/2012	11:59:17 AM	H2 valve opened
5/8/2012	11:59:17 AM	Bubbler valve opened
5/8/2012	11:59:17 AM	Helium MFC set to  0.000000
5/8/2012	11:59:17 AM	H2 MFC set to  500.000000
5/8/2012	11:59:17 AM	BCl3 MFC set to  0.000000
5/8/2012	11:59:17 AM	PH3 MFC set to  0.000000
5/8/2012	11:59:17 AM	SiCl4 MFC set to  0.000000
5/8/2012	11:59:17 AM	Bypass solenoid MFC set to  0.000000
5/8/2012	11:59:17 AM	Tube furnace set to 1000
5/8/2012	12:24:17 PM	Helium valve closed
5/8/2012	12:24:17 PM	PH3 valve closed
5/8/2012	12:24:17 PM	Main Vac valve closed
5/8/2012	12:24:17 PM	Bypass valve closed
5/8/2012	12:24:17 PM	H2 valve opened
5/8/2012	12:24:17 PM	BCl3 valve opened
5/8/2012	12:24:17 PM	SiCl4 pre valve opened
5/8/2012	12:24:17 PM	SiCl4 post valve opened
5/8/2012	12:24:17 PM	Bubbler valve opened
5/8/2012	12:24:17 PM	Helium MFC set to  0.000000
5/8/2012	12:24:17 PM	H2 MFC set to  450.000000
5/8/2012	12:24:17 PM	BCl3 MFC set to  1.000000
5/8/2012	12:24:17 PM	PH3 MFC set to  0.000000
5/8/2012	12:24:17 PM	SiCl4 MFC set to  50.000000
5/8/2012	12:24:17 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	12:24:17 PM	Tube furnace set to 1000
5/8/2012	12:55:17 PM	Helium valve closed
5/8/2012	12:55:17 PM	BCl3 valve closed
5/8/2012	12:55:17 PM	Main Vac valve closed
5/8/2012	12:55:17 PM	Bypass valve closed
5/8/2012	12:55:17 PM	H2 valve opened
5/8/2012	12:55:17 PM	PH3 valve opened
5/8/2012	12:55:17 PM	SiCl4 pre valve opened
5/8/2012	12:55:17 PM	SiCl4 post valve opened
5/8/2012	12:55:17 PM	Bubbler valve opened
5/8/2012	12:55:17 PM	Helium MFC set to  0.000000
5/8/2012	12:55:17 PM	H2 MFC set to  430.000000
5/8/2012	12:55:17 PM	BCl3 MFC set to  0.000000
5/8/2012	12:55:17 PM	PH3 MFC set to  20.000000
5/8/2012	12:55:17 PM	SiCl4 MFC set to  50.000000
5/8/2012	12:55:17 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	12:55:17 PM	Tube furnace set to 1000
5/8/2012	12:57:17 PM	Helium valve closed
5/8/2012	12:57:17 PM	BCl3 valve closed
5/8/2012	12:57:17 PM	PH3 valve closed
5/8/2012	12:57:17 PM	SiCl4 pre valve closed
5/8/2012	12:57:17 PM	SiCl4 post valve closed
5/8/2012	12:57:17 PM	Main Vac valve closed
5/8/2012	12:57:17 PM	Bypass valve closed
5/8/2012	12:57:17 PM	H2 valve opened
5/8/2012	12:57:17 PM	Bubbler valve opened
5/8/2012	12:57:17 PM	Helium MFC set to  0.000000
5/8/2012	12:57:17 PM	H2 MFC set to  500.000000
5/8/2012	12:57:17 PM	BCl3 MFC set to  0.000000
5/8/2012	12:57:17 PM	PH3 MFC set to  0.000000
5/8/2012	12:57:17 PM	SiCl4 MFC set to  0.000000
5/8/2012	12:57:17 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	12:57:18 PM	Tube furnace set to 750
5/8/2012	1:12:18 PM	H2 valve closed
5/8/2012	1:12:18 PM	BCl3 valve closed
5/8/2012	1:12:18 PM	PH3 valve closed
5/8/2012	1:12:18 PM	SiCl4 pre valve closed
5/8/2012	1:12:18 PM	SiCl4 post valve closed
5/8/2012	1:12:18 PM	Main Vac valve closed
5/8/2012	1:12:18 PM	Bypass valve closed
5/8/2012	1:12:18 PM	Helium valve opened
5/8/2012	1:12:18 PM	Bubbler valve opened
5/8/2012	1:12:18 PM	Helium MFC set to  500.000000
5/8/2012	1:12:18 PM	H2 MFC set to  0.000000
5/8/2012	1:12:18 PM	BCl3 MFC set to  0.000000
5/8/2012	1:12:18 PM	PH3 MFC set to  0.000000
5/8/2012	1:12:18 PM	SiCl4 MFC set to  0.000000
5/8/2012	1:12:18 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	1:12:18 PM	Tube furnace set to 0
5/8/2012	1:32:18 PM	Helium valve closed
5/8/2012	1:32:18 PM	H2 valve closed
5/8/2012	1:32:18 PM	BCl3 valve closed
5/8/2012	1:32:18 PM	PH3 valve closed
5/8/2012	1:32:18 PM	SiCl4 pre valve closed
5/8/2012	1:32:18 PM	SiCl4 post valve closed
5/8/2012	1:32:18 PM	Main Vac valve closed
5/8/2012	1:32:18 PM	Bypass valve closed
5/8/2012	1:32:18 PM	Bubbler valve closed
5/8/2012	1:32:18 PM	Helium MFC set to  0.000000
5/8/2012	1:32:18 PM	H2 MFC set to  0.000000
5/8/2012	1:32:18 PM	BCl3 MFC set to  0.000000
5/8/2012	1:32:18 PM	PH3 MFC set to  0.000000
5/8/2012	1:32:18 PM	SiCl4 MFC set to  0.000000
5/8/2012	1:32:18 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	1:32:18 PM	Tube furnace set to 0
5/8/2012	1:52:18 PM	Helium valve closed
5/8/2012	1:52:18 PM	H2 valve closed
5/8/2012	1:52:18 PM	BCl3 valve closed
5/8/2012	1:52:18 PM	PH3 valve closed
5/8/2012	1:52:18 PM	SiCl4 pre valve closed
5/8/2012	1:52:18 PM	SiCl4 post valve closed
5/8/2012	1:52:18 PM	Main Vac valve closed
5/8/2012	1:52:18 PM	Bubbler valve closed
5/8/2012	1:52:18 PM	Bypass valve opened
5/8/2012	1:52:18 PM	Helium MFC set to  0.000000
5/8/2012	1:52:18 PM	H2 MFC set to  0.000000
5/8/2012	1:52:18 PM	BCl3 MFC set to  0.000000
5/8/2012	1:52:18 PM	PH3 MFC set to  0.000000
5/8/2012	1:52:18 PM	SiCl4 MFC set to  0.000000
5/8/2012	1:52:18 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	1:52:18 PM	Tube furnace set to 0
5/8/2012	1:53:10 PM	Helium valve closed
5/8/2012	1:53:10 PM	H2 valve closed
5/8/2012	1:53:10 PM	BCl3 valve closed
5/8/2012	1:53:10 PM	PH3 valve closed
5/8/2012	1:53:10 PM	SiCl4 pre valve closed
5/8/2012	1:53:10 PM	SiCl4 post valve closed
5/8/2012	1:53:10 PM	Main Vac valve closed
5/8/2012	1:53:10 PM	Bubbler valve closed
5/8/2012	1:53:10 PM	Bypass valve opened
5/8/2012	1:53:10 PM	Helium MFC set to  0.000000
5/8/2012	1:53:10 PM	H2 MFC set to  0.000000
5/8/2012	1:53:10 PM	BCl3 MFC set to  0.000000
5/8/2012	1:53:10 PM	PH3 MFC set to  0.000000
5/8/2012	1:53:10 PM	SiCl4 MFC set to  0.000000
5/8/2012	1:53:10 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	1:53:10 PM	Tube furnace set to 0
5/8/2012	1:54:10 PM	Helium valve closed
5/8/2012	1:54:10 PM	H2 valve closed
5/8/2012	1:54:10 PM	BCl3 valve closed
5/8/2012	1:54:10 PM	PH3 valve closed
5/8/2012	1:54:10 PM	SiCl4 pre valve closed
5/8/2012	1:54:10 PM	SiCl4 post valve closed
5/8/2012	1:54:10 PM	Bypass valve closed
5/8/2012	1:54:10 PM	Bubbler valve closed
5/8/2012	1:54:10 PM	Main Vac valve opened
5/8/2012	1:54:10 PM	Helium MFC set to  0.000000
5/8/2012	1:54:10 PM	H2 MFC set to  0.000000
5/8/2012	1:54:10 PM	BCl3 MFC set to  0.000000
5/8/2012	1:54:10 PM	PH3 MFC set to  0.000000
5/8/2012	1:54:10 PM	SiCl4 MFC set to  0.000000
5/8/2012	1:54:10 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	1:54:10 PM	Tube furnace set to 0
5/8/2012	2:12:26 PM	Run finished at 2:12 PM
5/8/2012	2:12:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2012	2:12:58 PM	Recipe started at 2:12 PM
5/8/2012	2:12:58 PM	Helium valve closed
5/8/2012	2:12:58 PM	H2 valve closed
5/8/2012	2:12:58 PM	BCl3 valve closed
5/8/2012	2:12:58 PM	PH3 valve closed
5/8/2012	2:12:58 PM	SiCl4 pre valve closed
5/8/2012	2:12:58 PM	SiCl4 post valve closed
5/8/2012	2:12:58 PM	Main Vac valve closed
5/8/2012	2:12:58 PM	Bypass valve closed
5/8/2012	2:12:58 PM	Bubbler valve closed
5/8/2012	2:12:58 PM	Helium MFC set to  0.000000
5/8/2012	2:12:58 PM	H2 MFC set to  0.000000
5/8/2012	2:12:58 PM	BCl3 MFC set to  0.000000
5/8/2012	2:12:58 PM	PH3 MFC set to  0.000000
5/8/2012	2:12:58 PM	SiCl4 MFC set to  0.000000
5/8/2012	2:12:58 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	2:12:58 PM	Tube furnace set to 0
5/8/2012	2:13:01 PM	H2 valve closed
5/8/2012	2:13:01 PM	BCl3 valve closed
5/8/2012	2:13:01 PM	PH3 valve closed
5/8/2012	2:13:01 PM	SiCl4 pre valve closed
5/8/2012	2:13:01 PM	SiCl4 post valve closed
5/8/2012	2:13:01 PM	Main Vac valve closed
5/8/2012	2:13:01 PM	Bypass valve closed
5/8/2012	2:13:01 PM	Bubbler valve closed
5/8/2012	2:13:01 PM	Helium valve opened
5/8/2012	2:13:01 PM	Helium MFC set to  500.000000
5/8/2012	2:13:01 PM	H2 MFC set to  0.000000
5/8/2012	2:13:01 PM	BCl3 MFC set to  0.000000
5/8/2012	2:13:01 PM	PH3 MFC set to  0.000000
5/8/2012	2:13:01 PM	SiCl4 MFC set to  0.000000
5/8/2012	2:13:01 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	2:13:01 PM	Tube furnace set to 0
5/8/2012	2:14:11 PM	Helium valve closed
5/8/2012	2:14:11 PM	H2 valve closed
5/8/2012	2:14:11 PM	BCl3 valve closed
5/8/2012	2:14:11 PM	PH3 valve closed
5/8/2012	2:14:11 PM	SiCl4 pre valve closed
5/8/2012	2:14:11 PM	SiCl4 post valve closed
5/8/2012	2:14:11 PM	Main Vac valve closed
5/8/2012	2:14:11 PM	Bypass valve closed
5/8/2012	2:14:11 PM	Bubbler valve closed
5/8/2012	2:14:11 PM	Helium MFC set to  0.000000
5/8/2012	2:14:11 PM	H2 MFC set to  0.000000
5/8/2012	2:14:11 PM	BCl3 MFC set to  0.000000
5/8/2012	2:14:11 PM	PH3 MFC set to  0.000000
5/8/2012	2:14:11 PM	SiCl4 MFC set to  0.000000
5/8/2012	2:14:11 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	2:14:11 PM	Tube furnace set to 0
5/8/2012	2:14:12 PM	Run finished at 2:14 PM
5/8/2012	2:14:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2012	2:25:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2012	2:25:29 PM	Recipe started at 2:25 PM
5/8/2012	2:25:29 PM	Helium valve closed
5/8/2012	2:25:29 PM	H2 valve closed
5/8/2012	2:25:29 PM	BCl3 valve closed
5/8/2012	2:25:29 PM	PH3 valve closed
5/8/2012	2:25:29 PM	SiCl4 pre valve closed
5/8/2012	2:25:29 PM	SiCl4 post valve closed
5/8/2012	2:25:29 PM	Main Vac valve closed
5/8/2012	2:25:29 PM	Bubbler valve closed
5/8/2012	2:25:29 PM	Bypass valve opened
5/8/2012	2:25:29 PM	Helium MFC set to  0.000000
5/8/2012	2:25:29 PM	H2 MFC set to  0.000000
5/8/2012	2:25:29 PM	BCl3 MFC set to  0.000000
5/8/2012	2:25:29 PM	PH3 MFC set to  0.000000
5/8/2012	2:25:29 PM	SiCl4 MFC set to  0.000000
5/8/2012	2:25:29 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	2:25:29 PM	Tube furnace set to 0
5/8/2012	2:26:41 PM	Helium valve closed
5/8/2012	2:26:41 PM	H2 valve closed
5/8/2012	2:26:41 PM	BCl3 valve closed
5/8/2012	2:26:41 PM	PH3 valve closed
5/8/2012	2:26:41 PM	SiCl4 pre valve closed
5/8/2012	2:26:41 PM	SiCl4 post valve closed
5/8/2012	2:26:41 PM	Main Vac valve closed
5/8/2012	2:26:41 PM	Bubbler valve closed
5/8/2012	2:26:41 PM	Bypass valve opened
5/8/2012	2:26:41 PM	Helium MFC set to  0.000000
5/8/2012	2:26:41 PM	H2 MFC set to  0.000000
5/8/2012	2:26:41 PM	BCl3 MFC set to  0.000000
5/8/2012	2:26:41 PM	PH3 MFC set to  0.000000
5/8/2012	2:26:41 PM	SiCl4 MFC set to  0.000000
5/8/2012	2:26:41 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	2:26:41 PM	Tube furnace set to 0
5/8/2012	2:27:41 PM	Helium valve closed
5/8/2012	2:27:41 PM	H2 valve closed
5/8/2012	2:27:41 PM	BCl3 valve closed
5/8/2012	2:27:41 PM	PH3 valve closed
5/8/2012	2:27:41 PM	SiCl4 pre valve closed
5/8/2012	2:27:41 PM	SiCl4 post valve closed
5/8/2012	2:27:41 PM	Bypass valve closed
5/8/2012	2:27:41 PM	Bubbler valve closed
5/8/2012	2:27:41 PM	Main Vac valve opened
5/8/2012	2:27:41 PM	Helium MFC set to  0.000000
5/8/2012	2:27:41 PM	H2 MFC set to  0.000000
5/8/2012	2:27:41 PM	BCl3 MFC set to  0.000000
5/8/2012	2:27:41 PM	PH3 MFC set to  0.000000
5/8/2012	2:27:41 PM	SiCl4 MFC set to  0.000000
5/8/2012	2:27:41 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	2:27:41 PM	Tube furnace set to 0
5/8/2012	2:27:42 PM	Run finished at 2:27 PM
5/8/2012	2:27:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2012	4:12:20 PM	Main Vac valve closed
5/8/2012	4:12:40 PM	Main Vac valve opened
5/8/2012	4:14:11 PM	Recipe started at 4:14 PM
5/8/2012	4:14:11 PM	Helium valve closed
5/8/2012	4:14:11 PM	H2 valve closed
5/8/2012	4:14:11 PM	BCl3 valve closed
5/8/2012	4:14:11 PM	PH3 valve closed
5/8/2012	4:14:11 PM	SiCl4 pre valve closed
5/8/2012	4:14:11 PM	SiCl4 post valve closed
5/8/2012	4:14:11 PM	Bypass valve closed
5/8/2012	4:14:11 PM	Bubbler valve closed
5/8/2012	4:14:11 PM	Main Vac valve opened
5/8/2012	4:14:11 PM	Helium MFC set to  0.000000
5/8/2012	4:14:11 PM	H2 MFC set to  0.000000
5/8/2012	4:14:11 PM	BCl3 MFC set to  0.000000
5/8/2012	4:14:11 PM	PH3 MFC set to  0.000000
5/8/2012	4:14:11 PM	SiCl4 MFC set to  0.000000
5/8/2012	4:14:11 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	4:14:11 PM	Tube furnace set to 0
5/8/2012	4:14:14 PM	Helium valve closed
5/8/2012	4:14:14 PM	H2 valve closed
5/8/2012	4:14:14 PM	BCl3 valve closed
5/8/2012	4:14:14 PM	PH3 valve closed
5/8/2012	4:14:14 PM	SiCl4 pre valve closed
5/8/2012	4:14:14 PM	SiCl4 post valve closed
5/8/2012	4:14:14 PM	Main Vac valve closed
5/8/2012	4:14:14 PM	Bypass valve closed
5/8/2012	4:14:14 PM	Bubbler valve closed
5/8/2012	4:14:14 PM	Helium MFC set to  0.000000
5/8/2012	4:14:14 PM	H2 MFC set to  0.000000
5/8/2012	4:14:14 PM	BCl3 MFC set to  0.000000
5/8/2012	4:14:14 PM	PH3 MFC set to  0.000000
5/8/2012	4:14:14 PM	SiCl4 MFC set to  0.000000
5/8/2012	4:14:14 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	4:14:14 PM	Tube furnace set to 0
5/8/2012	4:14:17 PM	Helium valve closed
5/8/2012	4:14:17 PM	BCl3 valve closed
5/8/2012	4:14:17 PM	PH3 valve closed
5/8/2012	4:14:17 PM	SiCl4 pre valve closed
5/8/2012	4:14:17 PM	SiCl4 post valve closed
5/8/2012	4:14:17 PM	Main Vac valve closed
5/8/2012	4:14:17 PM	Bypass valve closed
5/8/2012	4:14:17 PM	Bubbler valve closed
5/8/2012	4:14:17 PM	H2 valve opened
5/8/2012	4:14:17 PM	Helium MFC set to  0.000000
5/8/2012	4:14:17 PM	H2 MFC set to  500.000000
5/8/2012	4:14:17 PM	BCl3 MFC set to  0.000000
5/8/2012	4:14:17 PM	PH3 MFC set to  0.000000
5/8/2012	4:14:17 PM	SiCl4 MFC set to  0.000000
5/8/2012	4:14:17 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	4:14:18 PM	Tube furnace set to 0
5/8/2012	4:15:33 PM	Helium valve closed
5/8/2012	4:15:33 PM	BCl3 valve closed
5/8/2012	4:15:33 PM	PH3 valve closed
5/8/2012	4:15:33 PM	SiCl4 pre valve closed
5/8/2012	4:15:33 PM	SiCl4 post valve closed
5/8/2012	4:15:33 PM	Main Vac valve closed
5/8/2012	4:15:33 PM	Bypass valve closed
5/8/2012	4:15:33 PM	H2 valve opened
5/8/2012	4:15:33 PM	Bubbler valve opened
5/8/2012	4:15:33 PM	Helium MFC set to  0.000000
5/8/2012	4:15:33 PM	H2 MFC set to  500.000000
5/8/2012	4:15:33 PM	BCl3 MFC set to  0.000000
5/8/2012	4:15:33 PM	PH3 MFC set to  0.000000
5/8/2012	4:15:33 PM	SiCl4 MFC set to  0.000000
5/8/2012	4:15:33 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	4:15:33 PM	Tube furnace set to 0
5/8/2012	4:15:34 PM	Helium valve closed
5/8/2012	4:15:34 PM	BCl3 valve closed
5/8/2012	4:15:34 PM	PH3 valve closed
5/8/2012	4:15:34 PM	SiCl4 pre valve closed
5/8/2012	4:15:34 PM	SiCl4 post valve closed
5/8/2012	4:15:34 PM	Main Vac valve closed
5/8/2012	4:15:34 PM	Bypass valve closed
5/8/2012	4:15:34 PM	H2 valve opened
5/8/2012	4:15:34 PM	Bubbler valve opened
5/8/2012	4:15:34 PM	Helium MFC set to  0.000000
5/8/2012	4:15:34 PM	H2 MFC set to  500.000000
5/8/2012	4:15:34 PM	BCl3 MFC set to  0.000000
5/8/2012	4:15:34 PM	PH3 MFC set to  0.000000
5/8/2012	4:15:34 PM	SiCl4 MFC set to  0.000000
5/8/2012	4:15:34 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	4:15:34 PM	Tube furnace set to 1000
5/8/2012	4:40:34 PM	Helium valve closed
5/8/2012	4:40:34 PM	PH3 valve closed
5/8/2012	4:40:34 PM	Main Vac valve closed
5/8/2012	4:40:34 PM	Bypass valve closed
5/8/2012	4:40:34 PM	H2 valve opened
5/8/2012	4:40:34 PM	BCl3 valve opened
5/8/2012	4:40:34 PM	SiCl4 pre valve opened
5/8/2012	4:40:34 PM	SiCl4 post valve opened
5/8/2012	4:40:34 PM	Bubbler valve opened
5/8/2012	4:40:34 PM	Helium MFC set to  0.000000
5/8/2012	4:40:34 PM	H2 MFC set to  450.000000
5/8/2012	4:40:34 PM	BCl3 MFC set to  1.000000
5/8/2012	4:40:34 PM	PH3 MFC set to  0.000000
5/8/2012	4:40:34 PM	SiCl4 MFC set to  50.000000
5/8/2012	4:40:34 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	4:40:34 PM	Tube furnace set to 1000
5/8/2012	5:13:34 PM	Helium valve closed
5/8/2012	5:13:34 PM	BCl3 valve closed
5/8/2012	5:13:34 PM	Main Vac valve closed
5/8/2012	5:13:34 PM	Bypass valve closed
5/8/2012	5:13:34 PM	H2 valve opened
5/8/2012	5:13:34 PM	PH3 valve opened
5/8/2012	5:13:34 PM	SiCl4 pre valve opened
5/8/2012	5:13:34 PM	SiCl4 post valve opened
5/8/2012	5:13:34 PM	Bubbler valve opened
5/8/2012	5:13:34 PM	Helium MFC set to  0.000000
5/8/2012	5:13:34 PM	H2 MFC set to  430.000000
5/8/2012	5:13:34 PM	BCl3 MFC set to  0.000000
5/8/2012	5:13:34 PM	PH3 MFC set to  20.000000
5/8/2012	5:13:34 PM	SiCl4 MFC set to  50.000000
5/8/2012	5:13:34 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	5:13:35 PM	Tube furnace set to 1000
5/8/2012	5:15:35 PM	Helium valve closed
5/8/2012	5:15:35 PM	BCl3 valve closed
5/8/2012	5:15:35 PM	PH3 valve closed
5/8/2012	5:15:35 PM	SiCl4 pre valve closed
5/8/2012	5:15:35 PM	SiCl4 post valve closed
5/8/2012	5:15:35 PM	Main Vac valve closed
5/8/2012	5:15:35 PM	Bypass valve closed
5/8/2012	5:15:35 PM	H2 valve opened
5/8/2012	5:15:35 PM	Bubbler valve opened
5/8/2012	5:15:35 PM	Helium MFC set to  0.000000
5/8/2012	5:15:35 PM	H2 MFC set to  500.000000
5/8/2012	5:15:35 PM	BCl3 MFC set to  0.000000
5/8/2012	5:15:35 PM	PH3 MFC set to  0.000000
5/8/2012	5:15:35 PM	SiCl4 MFC set to  0.000000
5/8/2012	5:15:35 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	5:15:35 PM	Tube furnace set to 750
5/8/2012	5:30:35 PM	H2 valve closed
5/8/2012	5:30:35 PM	BCl3 valve closed
5/8/2012	5:30:35 PM	PH3 valve closed
5/8/2012	5:30:35 PM	SiCl4 pre valve closed
5/8/2012	5:30:35 PM	SiCl4 post valve closed
5/8/2012	5:30:35 PM	Main Vac valve closed
5/8/2012	5:30:35 PM	Bypass valve closed
5/8/2012	5:30:35 PM	Helium valve opened
5/8/2012	5:30:35 PM	Bubbler valve opened
5/8/2012	5:30:35 PM	Helium MFC set to  500.000000
5/8/2012	5:30:35 PM	H2 MFC set to  0.000000
5/8/2012	5:30:35 PM	BCl3 MFC set to  0.000000
5/8/2012	5:30:35 PM	PH3 MFC set to  0.000000
5/8/2012	5:30:35 PM	SiCl4 MFC set to  0.000000
5/8/2012	5:30:35 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	5:30:35 PM	Tube furnace set to 0
5/8/2012	5:50:35 PM	Helium valve closed
5/8/2012	5:50:35 PM	H2 valve closed
5/8/2012	5:50:35 PM	BCl3 valve closed
5/8/2012	5:50:35 PM	PH3 valve closed
5/8/2012	5:50:35 PM	SiCl4 pre valve closed
5/8/2012	5:50:35 PM	SiCl4 post valve closed
5/8/2012	5:50:35 PM	Main Vac valve closed
5/8/2012	5:50:35 PM	Bypass valve closed
5/8/2012	5:50:35 PM	Bubbler valve closed
5/8/2012	5:50:35 PM	Helium MFC set to  0.000000
5/8/2012	5:50:35 PM	H2 MFC set to  0.000000
5/8/2012	5:50:35 PM	BCl3 MFC set to  0.000000
5/8/2012	5:50:35 PM	PH3 MFC set to  0.000000
5/8/2012	5:50:35 PM	SiCl4 MFC set to  0.000000
5/8/2012	5:50:35 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	5:50:35 PM	Tube furnace set to 0
5/8/2012	6:03:01 PM	Helium valve closed
5/8/2012	6:03:01 PM	H2 valve closed
5/8/2012	6:03:01 PM	BCl3 valve closed
5/8/2012	6:03:01 PM	PH3 valve closed
5/8/2012	6:03:01 PM	SiCl4 pre valve closed
5/8/2012	6:03:01 PM	SiCl4 post valve closed
5/8/2012	6:03:01 PM	Main Vac valve closed
5/8/2012	6:03:01 PM	Bubbler valve closed
5/8/2012	6:03:01 PM	Bypass valve opened
5/8/2012	6:03:01 PM	Helium MFC set to  0.000000
5/8/2012	6:03:01 PM	H2 MFC set to  0.000000
5/8/2012	6:03:01 PM	BCl3 MFC set to  0.000000
5/8/2012	6:03:01 PM	PH3 MFC set to  0.000000
5/8/2012	6:03:01 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:03:01 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:03:01 PM	Tube furnace set to 0
5/8/2012	6:03:57 PM	Helium valve closed
5/8/2012	6:03:57 PM	H2 valve closed
5/8/2012	6:03:57 PM	BCl3 valve closed
5/8/2012	6:03:57 PM	PH3 valve closed
5/8/2012	6:03:57 PM	SiCl4 pre valve closed
5/8/2012	6:03:57 PM	SiCl4 post valve closed
5/8/2012	6:03:57 PM	Main Vac valve closed
5/8/2012	6:03:57 PM	Bubbler valve closed
5/8/2012	6:03:57 PM	Bypass valve opened
5/8/2012	6:03:57 PM	Helium MFC set to  0.000000
5/8/2012	6:03:57 PM	H2 MFC set to  0.000000
5/8/2012	6:03:57 PM	BCl3 MFC set to  0.000000
5/8/2012	6:03:57 PM	PH3 MFC set to  0.000000
5/8/2012	6:03:57 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:03:57 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:03:57 PM	Tube furnace set to 0
5/8/2012	6:04:57 PM	Helium valve closed
5/8/2012	6:04:57 PM	H2 valve closed
5/8/2012	6:04:57 PM	BCl3 valve closed
5/8/2012	6:04:57 PM	PH3 valve closed
5/8/2012	6:04:57 PM	SiCl4 pre valve closed
5/8/2012	6:04:57 PM	SiCl4 post valve closed
5/8/2012	6:04:57 PM	Bypass valve closed
5/8/2012	6:04:57 PM	Bubbler valve closed
5/8/2012	6:04:57 PM	Main Vac valve opened
5/8/2012	6:04:57 PM	Helium MFC set to  0.000000
5/8/2012	6:04:57 PM	H2 MFC set to  0.000000
5/8/2012	6:04:57 PM	BCl3 MFC set to  0.000000
5/8/2012	6:04:57 PM	PH3 MFC set to  0.000000
5/8/2012	6:04:57 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:04:57 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:04:58 PM	Tube furnace set to 0
5/8/2012	6:05:38 PM	Run finished at 6:05 PM
5/8/2012	6:06:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2012	6:06:05 PM	Recipe started at 6:06 PM
5/8/2012	6:06:05 PM	Helium valve closed
5/8/2012	6:06:05 PM	H2 valve closed
5/8/2012	6:06:05 PM	BCl3 valve closed
5/8/2012	6:06:05 PM	PH3 valve closed
5/8/2012	6:06:05 PM	SiCl4 pre valve closed
5/8/2012	6:06:05 PM	SiCl4 post valve closed
5/8/2012	6:06:05 PM	Main Vac valve closed
5/8/2012	6:06:05 PM	Bypass valve closed
5/8/2012	6:06:05 PM	Bubbler valve closed
5/8/2012	6:06:05 PM	Helium MFC set to  0.000000
5/8/2012	6:06:05 PM	H2 MFC set to  0.000000
5/8/2012	6:06:05 PM	BCl3 MFC set to  0.000000
5/8/2012	6:06:05 PM	PH3 MFC set to  0.000000
5/8/2012	6:06:05 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:06:05 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:06:05 PM	Tube furnace set to 0
5/8/2012	6:06:08 PM	H2 valve closed
5/8/2012	6:06:08 PM	BCl3 valve closed
5/8/2012	6:06:08 PM	PH3 valve closed
5/8/2012	6:06:08 PM	SiCl4 pre valve closed
5/8/2012	6:06:08 PM	SiCl4 post valve closed
5/8/2012	6:06:08 PM	Main Vac valve closed
5/8/2012	6:06:08 PM	Bypass valve closed
5/8/2012	6:06:08 PM	Bubbler valve closed
5/8/2012	6:06:08 PM	Helium valve opened
5/8/2012	6:06:08 PM	Helium MFC set to  500.000000
5/8/2012	6:06:08 PM	H2 MFC set to  0.000000
5/8/2012	6:06:08 PM	BCl3 MFC set to  0.000000
5/8/2012	6:06:08 PM	PH3 MFC set to  0.000000
5/8/2012	6:06:08 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:06:08 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:06:08 PM	Tube furnace set to 0
5/8/2012	6:07:19 PM	Helium valve closed
5/8/2012	6:07:19 PM	H2 valve closed
5/8/2012	6:07:19 PM	BCl3 valve closed
5/8/2012	6:07:19 PM	PH3 valve closed
5/8/2012	6:07:19 PM	SiCl4 pre valve closed
5/8/2012	6:07:19 PM	SiCl4 post valve closed
5/8/2012	6:07:19 PM	Main Vac valve closed
5/8/2012	6:07:19 PM	Bypass valve closed
5/8/2012	6:07:19 PM	Bubbler valve closed
5/8/2012	6:07:19 PM	Helium MFC set to  0.000000
5/8/2012	6:07:19 PM	H2 MFC set to  0.000000
5/8/2012	6:07:19 PM	BCl3 MFC set to  0.000000
5/8/2012	6:07:19 PM	PH3 MFC set to  0.000000
5/8/2012	6:07:19 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:07:19 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:07:19 PM	Tube furnace set to 0
5/8/2012	6:07:20 PM	Run finished at 6:07 PM
5/8/2012	6:07:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2012	6:15:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2012	6:15:09 PM	Recipe started at 6:15 PM
5/8/2012	6:15:09 PM	Helium valve closed
5/8/2012	6:15:09 PM	H2 valve closed
5/8/2012	6:15:09 PM	BCl3 valve closed
5/8/2012	6:15:09 PM	PH3 valve closed
5/8/2012	6:15:09 PM	SiCl4 pre valve closed
5/8/2012	6:15:09 PM	SiCl4 post valve closed
5/8/2012	6:15:09 PM	Main Vac valve closed
5/8/2012	6:15:09 PM	Bubbler valve closed
5/8/2012	6:15:09 PM	Bypass valve opened
5/8/2012	6:15:09 PM	Helium MFC set to  0.000000
5/8/2012	6:15:09 PM	H2 MFC set to  0.000000
5/8/2012	6:15:09 PM	BCl3 MFC set to  0.000000
5/8/2012	6:15:09 PM	PH3 MFC set to  0.000000
5/8/2012	6:15:09 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:15:09 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:15:09 PM	Tube furnace set to 0
5/8/2012	6:16:19 PM	Helium valve closed
5/8/2012	6:16:19 PM	H2 valve closed
5/8/2012	6:16:19 PM	BCl3 valve closed
5/8/2012	6:16:19 PM	PH3 valve closed
5/8/2012	6:16:19 PM	SiCl4 pre valve closed
5/8/2012	6:16:19 PM	SiCl4 post valve closed
5/8/2012	6:16:19 PM	Main Vac valve closed
5/8/2012	6:16:19 PM	Bubbler valve closed
5/8/2012	6:16:19 PM	Bypass valve opened
5/8/2012	6:16:19 PM	Helium MFC set to  0.000000
5/8/2012	6:16:19 PM	H2 MFC set to  0.000000
5/8/2012	6:16:19 PM	BCl3 MFC set to  0.000000
5/8/2012	6:16:19 PM	PH3 MFC set to  0.000000
5/8/2012	6:16:19 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:16:19 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:16:19 PM	Tube furnace set to 0
5/8/2012	6:17:19 PM	Helium valve closed
5/8/2012	6:17:19 PM	H2 valve closed
5/8/2012	6:17:19 PM	BCl3 valve closed
5/8/2012	6:17:19 PM	PH3 valve closed
5/8/2012	6:17:19 PM	SiCl4 pre valve closed
5/8/2012	6:17:19 PM	SiCl4 post valve closed
5/8/2012	6:17:19 PM	Bypass valve closed
5/8/2012	6:17:19 PM	Bubbler valve closed
5/8/2012	6:17:19 PM	Main Vac valve opened
5/8/2012	6:17:19 PM	Helium MFC set to  0.000000
5/8/2012	6:17:19 PM	H2 MFC set to  0.000000
5/8/2012	6:17:19 PM	BCl3 MFC set to  0.000000
5/8/2012	6:17:19 PM	PH3 MFC set to  0.000000
5/8/2012	6:17:19 PM	SiCl4 MFC set to  0.000000
5/8/2012	6:17:19 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	6:17:19 PM	Tube furnace set to 0
5/8/2012	6:17:20 PM	Run finished at 6:17 PM
5/8/2012	6:17:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2012	7:01:52 PM	Main Vac valve closed
5/8/2012	7:02:02 PM	Main Vac valve opened
5/8/2012	7:02:23 PM	Main Vac valve closed
5/8/2012	7:02:35 PM	Main Vac valve opened
5/8/2012	7:04:58 PM	Recipe started at 7:04 PM
5/8/2012	7:04:58 PM	Helium valve closed
5/8/2012	7:04:58 PM	H2 valve closed
5/8/2012	7:04:58 PM	BCl3 valve closed
5/8/2012	7:04:58 PM	PH3 valve closed
5/8/2012	7:04:58 PM	SiCl4 pre valve closed
5/8/2012	7:04:58 PM	SiCl4 post valve closed
5/8/2012	7:04:58 PM	Bypass valve closed
5/8/2012	7:04:58 PM	Bubbler valve closed
5/8/2012	7:04:58 PM	Main Vac valve opened
5/8/2012	7:04:58 PM	Helium MFC set to  0.000000
5/8/2012	7:04:58 PM	H2 MFC set to  0.000000
5/8/2012	7:04:58 PM	BCl3 MFC set to  0.000000
5/8/2012	7:04:58 PM	PH3 MFC set to  0.000000
5/8/2012	7:04:58 PM	SiCl4 MFC set to  0.000000
5/8/2012	7:04:58 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	7:04:58 PM	Tube furnace set to 0
5/8/2012	8:04:58 PM	Helium valve closed
5/8/2012	8:04:58 PM	H2 valve closed
5/8/2012	8:04:58 PM	BCl3 valve closed
5/8/2012	8:04:58 PM	PH3 valve closed
5/8/2012	8:04:58 PM	SiCl4 pre valve closed
5/8/2012	8:04:58 PM	SiCl4 post valve closed
5/8/2012	8:04:58 PM	Main Vac valve closed
5/8/2012	8:04:58 PM	Bypass valve closed
5/8/2012	8:04:58 PM	Bubbler valve closed
5/8/2012	8:04:58 PM	Helium MFC set to  0.000000
5/8/2012	8:04:58 PM	H2 MFC set to  0.000000
5/8/2012	8:04:58 PM	BCl3 MFC set to  0.000000
5/8/2012	8:04:58 PM	PH3 MFC set to  0.000000
5/8/2012	8:04:58 PM	SiCl4 MFC set to  0.000000
5/8/2012	8:04:58 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	8:04:58 PM	Tube furnace set to 0
5/8/2012	8:05:01 PM	Helium valve closed
5/8/2012	8:05:01 PM	BCl3 valve closed
5/8/2012	8:05:01 PM	PH3 valve closed
5/8/2012	8:05:01 PM	SiCl4 pre valve closed
5/8/2012	8:05:01 PM	SiCl4 post valve closed
5/8/2012	8:05:01 PM	Main Vac valve closed
5/8/2012	8:05:01 PM	Bypass valve closed
5/8/2012	8:05:01 PM	Bubbler valve closed
5/8/2012	8:05:01 PM	H2 valve opened
5/8/2012	8:05:01 PM	Helium MFC set to  0.000000
5/8/2012	8:05:01 PM	H2 MFC set to  500.000000
5/8/2012	8:05:01 PM	BCl3 MFC set to  0.000000
5/8/2012	8:05:01 PM	PH3 MFC set to  0.000000
5/8/2012	8:05:01 PM	SiCl4 MFC set to  0.000000
5/8/2012	8:05:01 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	8:05:01 PM	Tube furnace set to 0
5/8/2012	8:06:16 PM	Helium valve closed
5/8/2012	8:06:16 PM	BCl3 valve closed
5/8/2012	8:06:16 PM	PH3 valve closed
5/8/2012	8:06:16 PM	SiCl4 pre valve closed
5/8/2012	8:06:16 PM	SiCl4 post valve closed
5/8/2012	8:06:16 PM	Main Vac valve closed
5/8/2012	8:06:16 PM	Bypass valve closed
5/8/2012	8:06:16 PM	H2 valve opened
5/8/2012	8:06:16 PM	Bubbler valve opened
5/8/2012	8:06:16 PM	Helium MFC set to  0.000000
5/8/2012	8:06:16 PM	H2 MFC set to  500.000000
5/8/2012	8:06:16 PM	BCl3 MFC set to  0.000000
5/8/2012	8:06:16 PM	PH3 MFC set to  0.000000
5/8/2012	8:06:16 PM	SiCl4 MFC set to  0.000000
5/8/2012	8:06:16 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	8:06:16 PM	Tube furnace set to 0
5/8/2012	8:06:17 PM	Helium valve closed
5/8/2012	8:06:17 PM	BCl3 valve closed
5/8/2012	8:06:17 PM	PH3 valve closed
5/8/2012	8:06:17 PM	SiCl4 pre valve closed
5/8/2012	8:06:17 PM	SiCl4 post valve closed
5/8/2012	8:06:17 PM	Main Vac valve closed
5/8/2012	8:06:17 PM	Bypass valve closed
5/8/2012	8:06:17 PM	H2 valve opened
5/8/2012	8:06:17 PM	Bubbler valve opened
5/8/2012	8:06:17 PM	Helium MFC set to  0.000000
5/8/2012	8:06:17 PM	H2 MFC set to  500.000000
5/8/2012	8:06:17 PM	BCl3 MFC set to  0.000000
5/8/2012	8:06:17 PM	PH3 MFC set to  0.000000
5/8/2012	8:06:17 PM	SiCl4 MFC set to  0.000000
5/8/2012	8:06:17 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	8:06:17 PM	Tube furnace set to 1000
5/8/2012	8:31:17 PM	Helium valve closed
5/8/2012	8:31:17 PM	PH3 valve closed
5/8/2012	8:31:17 PM	Main Vac valve closed
5/8/2012	8:31:17 PM	Bypass valve closed
5/8/2012	8:31:17 PM	H2 valve opened
5/8/2012	8:31:17 PM	BCl3 valve opened
5/8/2012	8:31:17 PM	SiCl4 pre valve opened
5/8/2012	8:31:17 PM	SiCl4 post valve opened
5/8/2012	8:31:17 PM	Bubbler valve opened
5/8/2012	8:31:17 PM	Helium MFC set to  0.000000
5/8/2012	8:31:17 PM	H2 MFC set to  450.000000
5/8/2012	8:31:17 PM	BCl3 MFC set to  1.000000
5/8/2012	8:31:17 PM	PH3 MFC set to  0.000000
5/8/2012	8:31:17 PM	SiCl4 MFC set to  50.000000
5/8/2012	8:31:17 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	8:31:18 PM	Tube furnace set to 1000
5/8/2012	9:04:17 PM	Helium valve closed
5/8/2012	9:04:17 PM	BCl3 valve closed
5/8/2012	9:04:17 PM	Main Vac valve closed
5/8/2012	9:04:17 PM	Bypass valve closed
5/8/2012	9:04:17 PM	H2 valve opened
5/8/2012	9:04:17 PM	PH3 valve opened
5/8/2012	9:04:17 PM	SiCl4 pre valve opened
5/8/2012	9:04:17 PM	SiCl4 post valve opened
5/8/2012	9:04:17 PM	Bubbler valve opened
5/8/2012	9:04:18 PM	Helium MFC set to  0.000000
5/8/2012	9:04:18 PM	H2 MFC set to  430.000000
5/8/2012	9:04:18 PM	BCl3 MFC set to  0.000000
5/8/2012	9:04:18 PM	PH3 MFC set to  20.000000
5/8/2012	9:04:18 PM	SiCl4 MFC set to  50.000000
5/8/2012	9:04:18 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:04:18 PM	Tube furnace set to 1000
5/8/2012	9:06:18 PM	Helium valve closed
5/8/2012	9:06:18 PM	BCl3 valve closed
5/8/2012	9:06:18 PM	PH3 valve closed
5/8/2012	9:06:18 PM	SiCl4 pre valve closed
5/8/2012	9:06:18 PM	SiCl4 post valve closed
5/8/2012	9:06:18 PM	Main Vac valve closed
5/8/2012	9:06:18 PM	Bypass valve closed
5/8/2012	9:06:18 PM	H2 valve opened
5/8/2012	9:06:18 PM	Bubbler valve opened
5/8/2012	9:06:18 PM	Helium MFC set to  0.000000
5/8/2012	9:06:18 PM	H2 MFC set to  500.000000
5/8/2012	9:06:18 PM	BCl3 MFC set to  0.000000
5/8/2012	9:06:18 PM	PH3 MFC set to  0.000000
5/8/2012	9:06:18 PM	SiCl4 MFC set to  0.000000
5/8/2012	9:06:18 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:06:18 PM	Tube furnace set to 750
5/8/2012	9:21:18 PM	H2 valve closed
5/8/2012	9:21:18 PM	BCl3 valve closed
5/8/2012	9:21:18 PM	PH3 valve closed
5/8/2012	9:21:18 PM	SiCl4 pre valve closed
5/8/2012	9:21:18 PM	SiCl4 post valve closed
5/8/2012	9:21:18 PM	Main Vac valve closed
5/8/2012	9:21:18 PM	Bypass valve closed
5/8/2012	9:21:18 PM	Helium valve opened
5/8/2012	9:21:18 PM	Bubbler valve opened
5/8/2012	9:21:18 PM	Helium MFC set to  500.000000
5/8/2012	9:21:18 PM	H2 MFC set to  0.000000
5/8/2012	9:21:18 PM	BCl3 MFC set to  0.000000
5/8/2012	9:21:18 PM	PH3 MFC set to  0.000000
5/8/2012	9:21:18 PM	SiCl4 MFC set to  0.000000
5/8/2012	9:21:18 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:21:18 PM	Tube furnace set to 0
5/8/2012	9:41:18 PM	Helium valve closed
5/8/2012	9:41:18 PM	H2 valve closed
5/8/2012	9:41:18 PM	BCl3 valve closed
5/8/2012	9:41:18 PM	PH3 valve closed
5/8/2012	9:41:18 PM	SiCl4 pre valve closed
5/8/2012	9:41:18 PM	SiCl4 post valve closed
5/8/2012	9:41:18 PM	Main Vac valve closed
5/8/2012	9:41:18 PM	Bypass valve closed
5/8/2012	9:41:18 PM	Bubbler valve closed
5/8/2012	9:41:18 PM	Helium MFC set to  0.000000
5/8/2012	9:41:18 PM	H2 MFC set to  0.000000
5/8/2012	9:41:18 PM	BCl3 MFC set to  0.000000
5/8/2012	9:41:18 PM	PH3 MFC set to  0.000000
5/8/2012	9:41:18 PM	SiCl4 MFC set to  0.000000
5/8/2012	9:41:18 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	9:41:18 PM	Tube furnace set to 0
5/8/2012	10:01:18 PM	Helium valve closed
5/8/2012	10:01:18 PM	H2 valve closed
5/8/2012	10:01:18 PM	BCl3 valve closed
5/8/2012	10:01:18 PM	PH3 valve closed
5/8/2012	10:01:18 PM	SiCl4 pre valve closed
5/8/2012	10:01:18 PM	SiCl4 post valve closed
5/8/2012	10:01:18 PM	Main Vac valve closed
5/8/2012	10:01:18 PM	Bubbler valve closed
5/8/2012	10:01:18 PM	Bypass valve opened
5/8/2012	10:01:18 PM	Helium MFC set to  0.000000
5/8/2012	10:01:18 PM	H2 MFC set to  0.000000
5/8/2012	10:01:18 PM	BCl3 MFC set to  0.000000
5/8/2012	10:01:19 PM	PH3 MFC set to  0.000000
5/8/2012	10:01:19 PM	SiCl4 MFC set to  0.000000
5/8/2012	10:01:19 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	10:01:19 PM	Tube furnace set to 0
5/8/2012	10:02:10 PM	Helium valve closed
5/8/2012	10:02:10 PM	H2 valve closed
5/8/2012	10:02:10 PM	BCl3 valve closed
5/8/2012	10:02:10 PM	PH3 valve closed
5/8/2012	10:02:10 PM	SiCl4 pre valve closed
5/8/2012	10:02:10 PM	SiCl4 post valve closed
5/8/2012	10:02:10 PM	Main Vac valve closed
5/8/2012	10:02:10 PM	Bubbler valve closed
5/8/2012	10:02:10 PM	Bypass valve opened
5/8/2012	10:02:10 PM	Helium MFC set to  0.000000
5/8/2012	10:02:10 PM	H2 MFC set to  0.000000
5/8/2012	10:02:10 PM	BCl3 MFC set to  0.000000
5/8/2012	10:02:10 PM	PH3 MFC set to  0.000000
5/8/2012	10:02:10 PM	SiCl4 MFC set to  0.000000
5/8/2012	10:02:10 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	10:02:10 PM	Tube furnace set to 0
5/8/2012	10:03:10 PM	Helium valve closed
5/8/2012	10:03:10 PM	H2 valve closed
5/8/2012	10:03:10 PM	BCl3 valve closed
5/8/2012	10:03:10 PM	PH3 valve closed
5/8/2012	10:03:10 PM	SiCl4 pre valve closed
5/8/2012	10:03:10 PM	SiCl4 post valve closed
5/8/2012	10:03:10 PM	Bypass valve closed
5/8/2012	10:03:10 PM	Bubbler valve closed
5/8/2012	10:03:10 PM	Main Vac valve opened
5/8/2012	10:03:10 PM	Helium MFC set to  0.000000
5/8/2012	10:03:10 PM	H2 MFC set to  0.000000
5/8/2012	10:03:10 PM	BCl3 MFC set to  0.000000
5/8/2012	10:03:10 PM	PH3 MFC set to  0.000000
5/8/2012	10:03:10 PM	SiCl4 MFC set to  0.000000
5/8/2012	10:03:10 PM	Bypass solenoid MFC set to  0.000000
5/8/2012	10:03:11 PM	Tube furnace set to 0
5/8/2012	11:03:11 PM	Run finished at 11:03 PM
